Assignee
KLA TENCOR INC
US·5 granted patents·2 pending applications·197 citations·filing 2000–2006
Top patents by PatentIndex Score
7 records- 0197US6812045B1Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantationKLA TENCOR INC·Filed 2001·Granted Nov 2, 2004·97 cites·52 claims
- 0290US6796697B1Illumination delivery systemKLA TENCOR INC·Filed 2002·Granted Sep 28, 2004·61 cites·59 claims
- 0389US6313467B1Broad spectrum ultraviolet inspection methods employing catadioptric imagingKLA TENCOR INC·Filed 2000·Granted Nov 6, 2001·28 cites·36 claims
- 0470US7403022B2Method for measuring peak carrier concentration in ultra-shallow junctionsKLA TENCOR INC·Filed 2006·Granted Jul 22, 2008·3 cites·9 claims
- 0556US7301638B1Dimensional calibration standardsKLA TENCOR INC·Filed 2004·Granted Nov 27, 2007·8 cites·41 claims
- 0645US2004073398A1Methods and systems for determining a critical dimension and a thin film characteristic of a specimenKLA TENCOR INC·Filed 2003·Application pending·0 cites
- 0740US2004005507A1Methods and systems for lithography process controlKLA TENCOR INC·Filed 2003·Application pending·0 cites
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