Assignee
KLA TENCOR MIE GMBH
DE·2 granted patents·1 pending application·7 citations·filing 2004–2011
Top patents by PatentIndex Score
3 records- 0173US8352886B2Method for the reproducible determination of the position of structures on a mask with a pellicle frameKLA TENCOR MIE GMBH·Filed 2011·Granted Jan 8, 2013·4 cites·9 claims
- 0249US7623698B2Method of learning a knowledge-based database used in automatic defect classificationKLA TENCOR MIE GMBH·Filed 2004·Granted Nov 24, 2009·3 cites·14 claims
- 0331US2010302555A1Metrology system and method for monitoring and correcting system generated errorsKLA TENCOR MIE GMBH·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →