Assignee
KLEO HALBLEITERTECHNIK GMBH
DE·4 granted patents·20 citations·filing 2002–2006
Technology mixG03F4
Top patents by PatentIndex Score
4 records- 0176US7652750B2Lithography exposure device having a plurality of radiation sourcesKLEO HALBLEITERTECHNIK GMBH·Filed 2006·Granted Jan 26, 2010·5 cites·14 claims
- 0266US7019818B2Apparatus for exposing substrate materialsKLEO HALBLEITERTECHNIK GMBH·Filed 2004·Granted Mar 28, 2006·9 cites·47 claims
- 0364US8027018B2Method and device for producing exposed structuresKLEO HALBLEITERTECHNIK GMBH·Filed 2005·Granted Sep 27, 2011·3 cites·76 claims
- 0449US6859261B2Lithography exposure deviceKLEO HALBLEITERTECHNIK GMBH·Filed 2002·Granted Feb 22, 2005·3 cites·50 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →