Assignee
KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS
NL·2 granted patents·0 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0132US9081309B2Detector module, cooling arrangement and lithographic apparatus comprising a detector moduleKNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS·Filed 2010·Granted Jul 14, 2015·0 cites·18 claims
- 0229US8817228B2Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangementKNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS·Filed 2010·Granted Aug 26, 2014·0 cites·17 claims
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