Assignee
KOBAYASHI YOICHI
JP·7 granted patents·51 citations·filing 2007–2011
Top patents by PatentIndex Score
7 records- 0190US8388408B2Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection methodKOBAYASHI YOICHI·Filed 2009·Granted Mar 5, 2013·15 cites·10 claims
- 0289US8246417B2Polishing apparatus and polishing methodKOBAYASHI YOICHI·Filed 2007·Granted Aug 21, 2012·16 cites·16 claims
- 0382US8398456B2Polishing method, polishing apparatus and method of monitoring a substrateKOBAYASHI YOICHI·Filed 2010·Granted Mar 19, 2013·5 cites·12 claims
- 0481US8582122B2Polishing monitoring method, polishing method, and polishing monitoring apparatusKOBAYASHI YOICHI·Filed 2011·Granted Nov 12, 2013·4 cites·28 claims
- 0581US8078419B2Polishing monitoring method and polishing apparatusKOBAYASHI YOICHI·Filed 2008·Granted Dec 13, 2011·8 cites·5 claims
- 0672US8112169B2Polishing apparatus and polishing methodKOBAYASHI YOICHI·Filed 2010·Granted Feb 7, 2012·2 cites·18 claims
- 0765US8876278B2Recording apparatusKOBAYASHI YOICHI·Filed 2011·Granted Nov 4, 2014·1 cites·5 claims
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