Assignee
KOBAYASHI YOSHIHITO
JP·3 granted patents·4 pending applications·4 citations·filing 2010–2012
Top patents by PatentIndex Score
7 records- 0173US8551393B2Patterning method and method for manufacturing semiconductor deviceKOBAYASHI YOSHIHITO·Filed 2010·Granted Oct 8, 2013·3 cites·14 claims
- 0269US9808841B2Reticle chuck cleaner and reticle chuck cleaning methodKOBAYASHI YOSHIHITO·Filed 2012·Granted Nov 7, 2017·1 cites·12 claims
- 0344US8663895B2Method for manufacturing template and method for manufacturing semiconductor deviceKOBAYASHI YOSHIHITO·Filed 2010·Granted Mar 4, 2014·0 cites·7 claims
- 0444US2013224324A1Sealant-attached template, method for storing template, template sealing apparatus, and template unsealing apparatusKOBAYASHI YOSHIHITO·Filed 2012·Application pending·0 cites
- 0543US2012244243A1Imprint lithography template, method of fabricating an imprint lithography template, and method of forming a patternKOBAYASHI YOSHIHITO·Filed 2012·Application pending·0 cites
- 0638US2012112370A1Template, method of forming template, and method of manufacturing semiconductor deviceKOBAYASHI YOSHIHITO·Filed 2011·Application pending·0 cites
- 0736US2010330807A1Semiconductor apparatus manufacturing method and imprint templateKOBAYASHI YOSHIHITO·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →