Assignee

KOGA SHINICHIRO

JP·1 granted patent·1 pending application·4 citations·filing 2010–2011

Technology mixG03F2 B82Y1 H10P1

Top patents by PatentIndex Score

2 records

0177US8305555B2Exposure apparatus, exposure method, and device manufacturing methodKOGA SHINICHIRO·Filed 2010·Granted Nov 6, 2012·4 cites·10 claims
0233US2011290136A1Lithographic apparatus and manufacturing method of commoditiesKOGA SHINICHIRO·Filed 2011·Application pending·0 cites

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