Assignee
KOHL ALEXANDER
DE·3 granted patents·5 citations·filing 2007–2011
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0177US8085382B2Microlithographic projection exposure apparatus illumination opticsKOHL ALEXANDER·Filed 2007·Granted Dec 27, 2011·3 cites·76 claims
- 0273US9223226B2Microlithographic projection exposure apparatus illumination opticsKOHL ALEXANDER·Filed 2011·Granted Dec 29, 2015·1 cites·16 claims
- 0372US9052611B2Microlithographic projection exposure apparatus illumination opticsKOHL ALEXANDER·Filed 2011·Granted Jun 9, 2015·1 cites·32 claims
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