Assignee

KOIZUMI RYUYA

JP·1 granted patent·4 citations·filing 2011–2011

Technology mixG05B1 G06Q1 H10P1 Y02P1

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0171US8655472B2Scheduler, substrate processing apparatus, and method of transferring substrates in substrate processing apparatusKOIZUMI RYUYA·Filed 2011·Granted Feb 18, 2014·4 cites·14 claims

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