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KOLICS ARTUR

US11 patents

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US8404626B2Mar 26, 2013

Post-deposition cleaning methods and formulations for substrates with cap layers

KOLICS ARTUR14 citations83
US8736055B2May 27, 2014

Methods and layers for metallization

KOLICS ARTUR9 citations76
US9058975B2Jun 16, 2015

Cleaning solution formulations for substrates

KOLICS ARTUR5 citations73
US8921296B2Dec 30, 2014

Post deposition wafer cleaning formulation

KOLICS ARTUR4 citations73
US9048088B2Jun 2, 2015

Processes and solutions for substrate cleaning and electroless deposition

KOLICS ARTUR4 citations71
US8632628B2Jan 21, 2014

Solutions and methods for metal deposition

KOLICS ARTUR2 citations63
US8328919B2Dec 11, 2012

Electroless deposition solutions and process control

KOLICS ARTUR4 citations63
US8895441B2Nov 25, 2014

Methods and materials for anchoring gapfill metals

KOLICS ARTUR0 citations52
US8518826B2Aug 27, 2013

Metallization processes, mixtures, and electronic devices

KOLICS ARTUR0 citations52
US8518815B2Aug 27, 2013

Methods, devices, and materials for metallization

KOLICS ARTUR0 citations52
US9153449B2Oct 6, 2015

Electroless gap fill

KOLICS ARTUR0 citations42