Assignee

KONG WEI

CN·1 granted patent·0 citations·filing 2011–2011

Technology mixC03C1 C23C1 H01F1 H01J1

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0137US10000844B2Magnetic field generator, magnetron cathode and spattering apparatusKONG WEI·Filed 2011·Granted Jun 19, 2018·0 cites·18 claims

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