Assignee

KONO MICHIO

JP·2 granted patents·0 citations·filing 2009–2009

Technology mixG03B2 G03F2

Top patents by PatentIndex Score

2 records

0141US8294874B2Exposure apparatusKONO MICHIO·Filed 2009·Granted Oct 23, 2012·0 cites·14 claims
0241US8174679B2Illumination optical system, exposure apparatus, and device fabrication methodKONO MICHIO·Filed 2009·Granted May 8, 2012·0 cites·10 claims

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