Assignee
KOO ANN F
US10 patents
Top patents by PatentIndex Score
US5452078ASep 19, 1995
Method and apparatus for finding wafer index marks and centers
KOO ANN F70 citations96
US5708279AJan 13, 1998
Method and apparatus for measuring surface topography
KOO ANN F27 citations92
US5523582AJun 4, 1996
Method and apparatus for measuring the curvature of wafers with a laser source selecting device
KOO ANN F23 citations92
US5270560ADec 14, 1993
Method and apparatus for measuring workpiece surface topography
KOO ANN F31 citations92
US6546820B1Apr 15, 2003
Method and apparatus for multifunction vacuum/nonvacuum annealing system
KOO ANN F19 citations90
US5917191AJun 29, 1999
Apparatus for measuring surface topography
KOO ANN F6 citations74
US5696383ADec 9, 1997
Method and apparatus for measuring the curvature of wafers with beams of different wavelengths
KOO ANN F15 citations74
US5369286ANov 29, 1994
Method and apparatus for measuring stress in a film applied to surface of a workpiece
KOO ANN F8 citations74
USD450000SNov 6, 2001
Multiple environment testing chamber
KOO ANN F11 citations73
US5532499AJul 2, 1996
Beam spot position detector having a detector moving mechanism
KOO ANN F2 citations63