Assignee
KOO BON-WOONG
US·5 granted patents·1 pending application·79 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0197US8916056B2Biasing system for a plasma processing apparatusKOO BON-WOONG·Filed 2012·Granted Dec 23, 2014·57 cites·10 claims
- 0289US8809800B2Ion source and a method for in-situ cleaning thereofKOO BON-WOONG·Filed 2009·Granted Aug 19, 2014·11 cites·16 claims
- 0387US8501624B2Excited gas injection for ion implant controlKOO BON-WOONG·Filed 2008·Granted Aug 6, 2013·11 cites·6 claims
- 0448US8461558B2System and method for ion implantation with dual purpose maskKOO BON-WOONG·Filed 2011·Granted Jun 11, 2013·0 cites·21 claims
- 0547US8329055B2Plasma uniformity control using biased arrayKOO BON-WOONG·Filed 2008·Granted Dec 11, 2012·0 cites·10 claims
- 0641US2008160212A1Method and apparatuses for providing electrical contact for plasma processing applicationsKOO BON-WOONG·Filed 2006·Application pending·0 cites
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