Assignee
KOSHIBA TAKESHI
JP·3 granted patents·5 pending applications·8 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0177US9389513B2Method of forming pattern, system for calculating resist coating distribution and program for calculating the sameKOSHIBA TAKESHI·Filed 2010·Granted Jul 12, 2016·3 cites·23 claims
- 0277US9046763B2Pattern forming methodKOSHIBA TAKESHI·Filed 2010·Granted Jun 2, 2015·3 cites·4 claims
- 0371US8423926B2Acceptance determining method of blank for EUV mask and manufacturing method of EUV maskKOSHIBA TAKESHI·Filed 2011·Granted Apr 16, 2013·2 cites·16 claims
- 0451US2009206280A1Charged-beam exposure apparatus having an improved alignment precision and exposure methodKOSHIBA TAKESHI·Filed 2009·Application pending·0 cites
- 0550US2009095711A1Microfabrication apparatus and device manufacturing methodKOSHIBA TAKESHI·Filed 2008·Application pending·0 cites
- 0648US2010029084A1Pattern forming method and pattern forming deviceKOSHIBA TAKESHI·Filed 2009·Application pending·0 cites
- 0743US2013220970A1Method for fabricating templateKOSHIBA TAKESHI·Filed 2012·Application pending·0 cites
- 0835US2011143271A1Pattern generating method and process determining methodKOSHIBA TAKESHI·Filed 2010·Application pending·0 cites
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