Assignee
KOSHIYAMA JUN
JP·3 granted patents·1 pending application·13 citations·filing 2005–2010
Top patents by PatentIndex Score
4 records- 0183US9244358B2Surface treatment liquid, surface treatment method, hydrophobilization method, and hydrophobilized substrateKOSHIYAMA JUN·Filed 2009·Granted Jan 26, 2016·9 cites·8 claims
- 0273US8058220B2Cleaning liquid for lithography and a cleaning method using it for photoexposure devicesKOSHIYAMA JUN·Filed 2010·Granted Nov 15, 2011·2 cites·9 claims
- 0372US8409360B2Cleaning method for a process of liquid immersion lithographyKOSHIYAMA JUN·Filed 2010·Granted Apr 2, 2013·2 cites·6 claims
- 0440US2007292808A1Developing Solution Composition for Lithography and Method for Resist Pattern FormationKOSHIYAMA JUN·Filed 2005·Application pending·0 cites
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