Assignee

KOSUGI TETSUYA

JP2 patents

Top patents by PatentIndex Score

US8822240B2Sep 2, 2014

Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device

KOSUGI TETSUYA1 citations47

US9779970B2Oct 3, 2017

Heater supporting device

KOSUGI TETSUYA0 citations36