Assignee

KOYAMA MASAHIRO

JP·2 granted patents·5 citations·filing 2009–2010

Technology mixG05B1 H01J1 H10P1 Y02P1

Top patents by PatentIndex Score

2 records

0173US8076651B2Specimen stage apparatus and specimen stage positioning control methodKOYAMA MASAHIRO·Filed 2009·Granted Dec 13, 2011·5 cites·4 claims
0237US9459617B2Motion controllerKOYAMA MASAHIRO·Filed 2010·Granted Oct 4, 2016·0 cites·7 claims

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