Assignee

KOYAMA YOSHITAKA

JP·1 granted patent·3 citations·filing 2011–2011

Technology mixG05B1 H01L1 H10P1 Y02P1

Top patents by PatentIndex Score

1 record

0164US9104196B2Substrate processing system and group managing apparatusKOYAMA YOSHITAKA·Filed 2011·Granted Aug 11, 2015·3 cites·13 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →