Assignee
KOYATA SAKAE
JP3 patents
Top patents by PatentIndex Score
US8759229B2Jun 24, 2014
Method for manufacturing epitaxial wafer
KOYATA SAKAE2 citations60
US8466071B2Jun 18, 2013
Method for etching single wafer
KOYATA SAKAE3 citations60
US8066896B2Nov 29, 2011
Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer
KOYATA SAKAE0 citations49