Assignee
KOZASA KAZUAKI
JP·5 granted patents·8 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0172US9305850B2Etching method and etching apparatus of semiconductor waferKOZASA KAZUAKI·Filed 2012·Granted Apr 5, 2016·3 cites·7 claims
- 0265US8303373B2Slurry supplying apparatus and method of polishing semiconductor wafer utilizing sameKOZASA KAZUAKI·Filed 2009·Granted Nov 6, 2012·3 cites·5 claims
- 0362US8273260B2Etching method and etching apparatus of semiconductor waferKOZASA KAZUAKI·Filed 2009·Granted Sep 25, 2012·2 cites·9 claims
- 0444US8992791B2Method of cleaning semiconductor wafer and semiconductor waferKOZASA KAZUAKI·Filed 2009·Granted Mar 31, 2015·0 cites·6 claims
- 0543US8696809B2Manufacturing method of epitaxial silicon wafer and substrate cleaning apparatusKOZASA KAZUAKI·Filed 2008·Granted Apr 15, 2014·0 cites·1 claims
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