Assignee
KRAMER TORSTEN
DE5 patents
Top patents by PatentIndex Score
US8470631B2Jun 25, 2013
Method for manufacturing capped MEMS components
KRAMER TORSTEN10 citations81
US8530261B2Sep 10, 2013
Method for producing a component, and sensor element
KRAMER TORSTEN1 citations49
US8389327B2Mar 5, 2013
Method for manufacturing chips
KRAMER TORSTEN0 citations49
US8405210B2Mar 26, 2013
Method for producing a plurality of chips and a chip produced accordingly
KRAMER TORSTEN1 citations46
US8519494B2Aug 27, 2013
Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate
KRAMER TORSTEN0 citations37