Assignee
KRIVTSUN VLADIMIR MIHAILOVITCH
RU·1 granted patent·1 pending application·0 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0143US8294128B2Apparatus with plasma radiation source and method of forming a beam of radiationKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Granted Oct 23, 2012·0 cites·17 claims
- 0229US2012229785A1Multilayer mirror, lithograpic apparatus, and methods for manufacturing a multilayer mirror and a productKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Application pending·0 cites
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