Assignee
KRUIT PIETER
NL·9 granted patents·88 citations·filing 2005–2012
Top patents by PatentIndex Score
9 records- 0196US8134135B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2007·Granted Mar 13, 2012·43 cites·43 claims
- 0294US8294117B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2010·Granted Oct 23, 2012·27 cites·32 claims
- 0384US8610093B2Direct write lithography systemKRUIT PIETER·Filed 2012·Granted Dec 17, 2013·3 cites·24 claims
- 0483US8598545B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2012·Granted Dec 3, 2013·4 cites·11 claims
- 0582US8188450B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2011·Granted May 29, 2012·4 cites·23 claims
- 0674US8895921B2Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatusKRUIT PIETER·Filed 2011·Granted Nov 25, 2014·3 cites·17 claims
- 0774US8648318B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2011·Granted Feb 11, 2014·2 cites·10 claims
- 0871US8153991B2Direct write lithography systemKRUIT PIETER·Filed 2005·Granted Apr 10, 2012·2 cites·9 claims
- 0948US8325321B2Lithography system, method of heat dissipation and frameKRUIT PIETER·Filed 2007·Granted Dec 4, 2012·0 cites·17 claims
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