Assignee
KU SHAO-YEN
TW·3 granted patents·33 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0192US8105851B1Nitride film wet strippingKU SHAO-YEN·Filed 2010·Granted Jan 31, 2012·19 cites·19 claims
- 0287US8616821B2Integrated apparatus to assure wafer quality and manufacturabilityKU SHAO-YEN·Filed 2010·Granted Dec 31, 2013·12 cites·5 claims
- 0362US9997384B2Methods for transporting wafers between wafer holders and chambersKU SHAO YEN·Filed 2011·Granted Jun 12, 2018·2 cites·20 claims
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