Assignee
KUAN CHIYAN
US·4 granted patents·9 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0176US8295580B2Substrate and die defect inspection methodKUAN CHIYAN·Filed 2009·Granted Oct 23, 2012·5 cites·20 claims
- 0273US8217349B2Method for inspecting EUV reticle and apparatus thereofKUAN CHIYAN·Filed 2010·Granted Jul 10, 2012·3 cites·9 claims
- 0363US8692193B2Method for inspecting EUV reticle and apparatus thereofKUAN CHIYAN·Filed 2012·Granted Apr 8, 2014·1 cites·32 claims
- 0450US8519333B2Charged particle system for reticle/wafer defects inspection and reviewKUAN CHIYAN·Filed 2012·Granted Aug 27, 2013·0 cites·22 claims
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