Assignee
KUGLER JENS
DE·4 granted patents·5 citations·filing 2005–2011
Top patents by PatentIndex Score
4 records- 0176US8488261B2Replacement apparatus for an optical elementKUGLER JENS·Filed 2011·Granted Jul 16, 2013·1 cites·35 claims
- 0268US8988654B2Support elements for an optical elementKUGLER JENS·Filed 2011·Granted Mar 24, 2015·2 cites·29 claims
- 0363US8711331B2Optical module for a microlithography objective including holding and supporting devicesKUGLER JENS·Filed 2005·Granted Apr 29, 2014·2 cites·27 claims
- 0440US8553202B2Projection objective for microlithographyKUGLER JENS·Filed 2010·Granted Oct 8, 2013·0 cites·30 claims
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