Assignee

KUMAMOTO TECHNOPOLIS FOUNDATIO

JP·1 granted patent·10 citations·filing 2001–2001

Technology mixG01J1

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0156US6987571B2Sensor head, luminance distribution measurement apparatus having the sensor head, and unevenness inspection/evaluation apparatusKUMAMOTO TECHNOPOLIS FOUNDATIO·Filed 2001·Granted Jan 17, 2006·10 cites·6 claims

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