Assignee
KURAMOTO YOSHIYUKI
JP·7 granted patents·17 citations·filing 2009–2012
Top patents by PatentIndex Score
7 records- 0172US8339611B2Interferometric distance measurement with harmonic frequency comb generated beamsKURAMOTO YOSHIYUKI·Filed 2009·Granted Dec 25, 2012·7 cites·13 claims
- 0269US8559015B2Measuring apparatusKURAMOTO YOSHIYUKI·Filed 2010·Granted Oct 15, 2013·3 cites·16 claims
- 0367US8576404B2Optical interferometerKURAMOTO YOSHIYUKI·Filed 2011·Granted Nov 5, 2013·3 cites·8 claims
- 0464US9115971B2Measuring apparatusKURAMOTO YOSHIYUKI·Filed 2012·Granted Aug 25, 2015·2 cites·6 claims
- 0562US9175953B2Measurement apparatus to calculate wavefront aberration of optical system using shearing interference fringes, exposure apparatus, and method of manufacturing deviceKURAMOTO YOSHIYUKI·Filed 2010·Granted Nov 3, 2015·2 cites·9 claims
- 0645US8724114B2Interferometer and distance calculation method thereforKURAMOTO YOSHIYUKI·Filed 2011·Granted May 13, 2014·0 cites·9 claims
- 0738US8692975B2Measurement apparatus, exposure apparatus, and device fabrication methodKURAMOTO YOSHIYUKI·Filed 2010·Granted Apr 8, 2014·0 cites·7 claims
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