Assignee

KUTHI ANDRAS

US2 patents

Top patents by PatentIndex Score

US8192576B2Jun 5, 2012

Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing

KUTHI ANDRAS2 citations56

US8303763B2Nov 6, 2012

Measuring and controlling wafer potential in pulsed RF bias processing

KUTHI ANDRAS0 citations45