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KWESKIN SASHA

US2 patents

Top patents by PatentIndex Score

US8236708B2Aug 7, 2012

Reduced pattern loading using bis(diethylamino)silane (C8H22N2Si) as silicon precursor

KWESKIN SASHA27 citations89

US8476142B2Jul 2, 2013

Preferential dielectric gapfill

KWESKIN SASHA4 citations56