Assignee
LABETSKI DZMITRY
NL3 patents
Top patents by PatentIndex Score
US9013679B2Apr 21, 2015
Collector mirror assembly and method for producing extreme ultraviolet radiation
LABETSKI DZMITRY2 citations60
US8405055B2Mar 26, 2013
Source module, radiation source and lithographic apparatus
LABETSKI DZMITRY0 citations50
US8220315B2Jul 17, 2012
Gas gauge, lithographic apparatus and device manufacturing method
LABETSKI DZMITRY1 citations47