Assignee

LACHAUD CHRISTOPHE

FR·0 granted patents·1 pending application·0 citations·filing 2011–2011

Technology mixC23C1 H01L1 H10F1 H10P1 Y02E1 Y02P1

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1 record

0134US2013330936A1METHOD OF DEPOSITION OF Al2O3/SiO2 STACKS, FROM ALUMINIUM AND SILICON PRECURSORSLACHAUD CHRISTOPHE·Filed 2011·Application pending·0 cites

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