Assignee
LAFARRE RAYMOND WILHELMUS LOUIS
NL·7 granted patents·4 pending applications·21 citations·filing 2010–2012
Top patents by PatentIndex Score
11 records- 0191US9423699B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Granted Aug 23, 2016·7 cites·20 claims
- 0284US9316927B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Apr 19, 2016·3 cites·20 claims
- 0382US9256139B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 9, 2016·3 cites·20 claims
- 0480US8902400B2Lithographic apparatus and a method of manufacturing a device using a lithographic apparatusLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Granted Dec 2, 2014·4 cites·15 claims
- 0579US8947640B2Positioning device, lithographic apparatus, positioning method and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 3, 2015·4 cites·20 claims
- 0649US2013077065A1Cleaning substrate for a lithography apparatus, a cleaning method for a lithography apparatus and a lithography apparatusLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Application pending·0 cites
- 0745US8553206B2Lithographic apparatus, coverplate and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2010·Granted Oct 8, 2013·0 cites·17 claims
- 0841US2013107241A1Lithographic apparatus and substrate handling methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Application pending·0 cites
- 0940US2013077078A1Lithographic Apparatus and Substrate Handling MethodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Application pending·0 cites
- 1039US2011292369A1Substrate table, a lithographic apparatus, a method of flattening an edge of a substrate and a device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Application pending·0 cites
- 1134US8941815B2Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2010·Granted Jan 27, 2015·0 cites·21 claims
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