Assignee
LAI CANFENG
US·1 granted patent·1 pending application·3 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0169US8317970B2Ceiling electrode with process gas dispersers housing plural inductive RF power applicators extending into the plasmaLAI CANFENG·Filed 2008·Granted Nov 27, 2012·3 cites·9 claims
- 0245US2011278260A1Inductive plasma source with metallic shower head using b-field concentratorLAI CANFENG·Filed 2010·Application pending·0 cites
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