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LAM RES
US5 patents
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US6569004B1May 27, 2003
Polishing pad and method of manufacture
LAM RES69 citations95
US7884033B2Feb 8, 2011
Method of depositing fluids within a microelectric topography processing chamber
LAM RES7 citations83
US7779782B2Aug 24, 2010
Systems and methods affecting profiles of solutions dispensed across microelectronic topographies during electroless plating processes
LAM RES7 citations73
US7714441B2May 11, 2010
Barrier layer configurations and methods for processing microelectronic topographies having barrier layers
LAM RES7 citations73
US6878301B2Apr 12, 2005
Methods and apparatuses for trench depth detection and control
LAM RES7 citations73