Assignee
LAM RES CORPORATION
US·5 granted patents·4 pending applications·0 citations·filing 2020–2025
Top patents by PatentIndex Score
9 records- 0189US2026101690A1Plasma uniformity control using a pulsed magnetic fieldLAM RES CORPORATION·Filed 2025·Application pending·0 cites
- 0261US2026101704A1Automated control of process chamber componentsLAM RES CORPORATION·Filed 2023·Application pending·0 cites
- 0360US12598925B2Non-metal incorporation in molybdenum on dielectric surfacesLAM RES CORPORATION·Filed 2022·Granted Apr 7, 2026·0 cites·8 claims
- 0460US2026098333A1Inhibited oxide deposition for refilling shallow trench isolationLAM RES CORPORATION·Filed 2023·Application pending·0 cites
- 0555US2026100338A1Bellows seal for low thru-force actuation of temperature probe across vacuum interfaceLAM RES CORPORATION·Filed 2023·Application pending·0 cites
- 0650US12598930B2Conformal thermal CVD with controlled film properties and high deposition rateLAM RES CORPORATION·Filed 2021·Granted Apr 7, 2026·0 cites·16 claims
- 0748US12598948B2Purging spindle arms to prevent deposition and wafer slidingLAM RES CORPORATION·Filed 2020·Granted Apr 7, 2026·0 cites·19 claims
- 0847US12598929B2Atomic layer etching of molybdenumLAM RES CORPORATION·Filed 2021·Granted Apr 7, 2026·0 cites·11 claims
- 0923USD1121578SShield for plasma chambersLAM RES CORPORATION·Filed 2023·Granted Apr 7, 2026·0 cites·1 claims
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