Assignee
LAM RESEARCH
US·3 granted patents·501 citations·filing 1987–1996
Top patents by PatentIndex Score
3 records- 0194US5835334AVariable high temperature chuck for high density plasma chemical vapor depositionLAM RESEARCH·Filed 1996·Granted Nov 10, 1998·269 cites·51 claims
- 0294US5262029AMethod and system for clamping semiconductor wafersLAM RESEARCH·Filed 1989·Granted Nov 16, 1993·188 cites·8 claims
- 0375US4833790AMethod and system for locating and positioning circular workpiecesLAM RESEARCH·Filed 1987·Granted May 30, 1989·44 cites·21 claims
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