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LASERTEC CORP
JP48 patents
Top patents by PatentIndex Score
US6858859B2Feb 22, 2005
Optically scanning apparatus and defect inspection system
LASERTEC CORP62 citations96
US6195202B1Feb 27, 2001
Laser microscope and a pattern inspection apparatus using such laser microscope
LASERTEC CORP55 citations96
US6043932AMar 28, 2000
Laser microscope and a pattern inspection apparatus using such laser microscope
LASERTEC CORP77 citations96
US7692128B2Apr 6, 2010
Focus control method for an optical apparatus which inspects a photo-mask or the like
LASERTEC CORP31 citations92
US5771097AJun 23, 1998
Mach-zehnder type interferometer
LASERTEC CORP20 citations88
US7907270B2Mar 15, 2011
Inspection apparatus and method, and production method for pattern substrates
LASERTEC CORP9 citations84
US6665326B2Dec 16, 2003
Light source device
LASERTEC CORP19 citations84
US6654110B2Nov 25, 2003
Image pickup apparatus and defect inspection apparatus for photomask
LASERTEC CORP14 citations84
US7643157B2Jan 5, 2010
Phase shift amount measurement apparatus and transmittance measurement apparatus
LASERTEC CORP8 citations83
US6727987B2Apr 27, 2004
Image pickup apparatus and defect inspection system for photomask
LASERTEC CORP20 citations83
US9719859B2Aug 1, 2017
Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams
LASERTEC CORP3 citations73
US9117869B2Aug 25, 2015
Chucking device and chucking method
LASERTEC CORP4 citations73
US9696568B2Jul 4, 2017
Light source apparatus and inspection apparatus
LASERTEC CORP6 citations72
US9588421B2Mar 7, 2017
Pellicle inspection apparatus
LASERTEC CORP6 citations71
US10319088B2Jun 11, 2019
Inspection apparatus of EUV mask and its focus adjustment method
LASERTEC CORP5 citations70
US9638739B2May 2, 2017
Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask
LASERTEC CORP2 citations70
US9638729B2May 2, 2017
Analysis apparatus and analysis method
LASERTEC CORP3 citations65
US9544558B2Jan 10, 2017
Measuring apparatus and measuring method
LASERTEC CORP2 citations65
US9551672B2Jan 24, 2017
Defect classifying method and optical inspection apparatus for silicon carbide substrate
LASERTEC CORP4 citations63
US10645289B2May 5, 2020
Optical apparatus and vibration removing method
LASERTEC CORP1 citations62
US7764414B2Jul 27, 2010
Illumination apparatus and illumination method
LASERTEC CORP2 citations62
US12308600B2May 20, 2025
Light source apparatus and inspection apparatus
LASERTEC CORP0 citations61
US7548309B2Jun 16, 2009
Inspection apparatus, inspection method, and manufacturing method of pattern substrate
LASERTEC CORP2 citations61
US12307736B2May 20, 2025
Image processing apparatus and image processing method
LASERTEC CORP1 citations60
US8879055B1Nov 4, 2014
Inspection method and inspection apparatus
LASERTEC CORP3 citations60
US12050184B2Jul 30, 2024
Mask inspection method and mask inspection apparatus
LASERTEC CORP0 citations59
US9970885B2May 15, 2018
Inspection apparatus and inspection method
LASERTEC CORP3 citations59
US7796343B2Sep 14, 2010
Photomask inspection apparatus
LASERTEC CORP2 citations59
US11353802B2Jun 7, 2022
Optical device, and method for preventing contamination of optical device
LASERTEC CORP0 citations58
US10712287B2Jul 14, 2020
Inspection device and inspection method
LASERTEC CORP1 citations58
US9013787B2Apr 21, 2015
Microscope and inspection apparatus
LASERTEC CORP2 citations57
US12504270B2Dec 23, 2025
Calculation method, image-capturing method, and image-capturing apparatus
LASERTEC CORP0 citations56
US10706527B2Jul 7, 2020
Correction method, correction apparatus, and inspection apparatus
LASERTEC CORP1 citations56
US11486693B2Nov 1, 2022
Measurement apparatus and measurement method
LASERTEC CORP0 citations55
US10539511B2Jan 21, 2020
Detection method, inspection method, detection apparatus, and inspection apparatus
LASERTEC CORP1 citations55
US12361536B2Jul 15, 2025
EUV mask inspection device, EUV mask inspection method, non-transitory computer-readable medium storing EUV mask inspection program, and EUV mask inspection system including a gray image based on design data of a pattern
LASERTEC CORP0 citations52
US9991670B2Jun 5, 2018
Laser light source device and inspection device
LASERTEC CORP1 citations51
US11822233B2Nov 21, 2023
Image pickup apparatus and focus adjustment method using bending correction to adjust focusing
LASERTEC CORP0 citations49
US9786057B2Oct 10, 2017
Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method
LASERTEC CORP1 citations48
US12259339B2Mar 25, 2025
Light-source apparatus, inspection apparatus, and adjustment method
LASERTEC CORP0 citations41
US12578281B2Mar 17, 2026
Defect inspection apparatus and defect inspection method
LASERTEC CORP0 citations40
US10761400B2Sep 1, 2020
Wavelength conversion apparatus and wavelength conversion method
LASERTEC CORP0 citations40
US9240041B2Jan 19, 2016
Defect inspection device, defect inspection method, and defect inspection program
LASERTEC CORP0 citations40
US10156664B2Dec 18, 2018
Mask inspection apparatus and mask inspection method
LASERTEC CORP0 citations39
US12566142B2Mar 3, 2026
Optical apparatus and examination apparatus
LASERTEC CORP0 citations38
US11372222B2Jun 28, 2022
Confocal microscope and method for taking image using the same
LASERTEC CORP0 citations38
US10801967B2Oct 13, 2020
Mask inspection apparatus, switching method, and mask inspection method
LASERTEC CORP0 citations34
US10106334B2Oct 23, 2018
Measurement apparatus, measurement method, and correction method
LASERTEC CORP0 citations27