Assignee
LASERTEC CORP
JP·48 granted patents·33 pending applications·371 citations·filing 1996–2025
Top patents by PatentIndex Score
81 records- 0194US7692128B2Focus control method for an optical apparatus which inspects a photo-mask or the likeLASERTEC CORP·Filed 2007·Granted Apr 6, 2010·31 cites·9 claims
- 0293US6858859B2Optically scanning apparatus and defect inspection systemLASERTEC CORP·Filed 2002·Granted Feb 22, 2005·62 cites·27 claims
- 0392US6195202B1Laser microscope and a pattern inspection apparatus using such laser microscopeLASERTEC CORP·Filed 2000·Granted Feb 27, 2001·55 cites·17 claims
- 0490US9588421B2Pellicle inspection apparatusLASERTEC CORP·Filed 2015·Granted Mar 7, 2017·6 cites·12 claims
- 0589US9696568B2Light source apparatus and inspection apparatusLASERTEC CORP·Filed 2016·Granted Jul 4, 2017·6 cites·6 claims
- 0688US6043932ALaser microscope and a pattern inspection apparatus using such laser microscopeLASERTEC CORP·Filed 1998·Granted Mar 28, 2000·77 cites·6 claims
- 0786US12307736B2Image processing apparatus and image processing methodLASERTEC CORP·Filed 2022·Granted May 20, 2025·1 cites·7 claims
- 0886US2026099097A1Control apparatus and control methodLASERTEC CORP·Filed 2025·Application pending·0 cites
- 0984US10319088B2Inspection apparatus of EUV mask and its focus adjustment methodLASERTEC CORP·Filed 2017·Granted Jun 11, 2019·5 cites·14 claims
- 1084US7907270B2Inspection apparatus and method, and production method for pattern substratesLASERTEC CORP·Filed 2008·Granted Mar 15, 2011·9 cites·15 claims
- 1184US2026064011A1Optical apparatus and method for controlling optical apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 1281US9719859B2Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beamsLASERTEC CORP·Filed 2014·Granted Aug 1, 2017·3 cites·12 claims
- 1380US9117869B2Chucking device and chucking methodLASERTEC CORP·Filed 2014·Granted Aug 25, 2015·4 cites·14 claims
- 1480US6727987B2Image pickup apparatus and defect inspection system for photomaskLASERTEC CORP·Filed 2001·Granted Apr 27, 2004·20 cites·26 claims
- 1580US2026016760A1Image processing apparatus, inspection apparatus, image processing method, and non-transitory computer readable mediumLASERTEC CORP·Filed 2025·Application pending·0 cites
- 1677US9638729B2Analysis apparatus and analysis methodLASERTEC CORP·Filed 2013·Granted May 2, 2017·3 cites·9 claims
- 1777US6665326B2Light source deviceLASERTEC CORP·Filed 2001·Granted Dec 16, 2003·19 cites·9 claims
- 1876US8879055B1Inspection method and inspection apparatusLASERTEC CORP·Filed 2014·Granted Nov 4, 2014·3 cites·14 claims
- 1976US6654110B2Image pickup apparatus and defect inspection apparatus for photomaskLASERTEC CORP·Filed 2002·Granted Nov 25, 2003·14 cites·12 claims
- 2076US2026099916A1Image processing method, image processing apparatus, and learning methodLASERTEC CORP·Filed 2025·Application pending·0 cites
- 2175US7643157B2Phase shift amount measurement apparatus and transmittance measurement apparatusLASERTEC CORP·Filed 2007·Granted Jan 5, 2010·8 cites·17 claims
- 2273US10645289B2Optical apparatus and vibration removing methodLASERTEC CORP·Filed 2017·Granted May 5, 2020·1 cites·10 claims
- 2373US10539511B2Detection method, inspection method, detection apparatus, and inspection apparatusLASERTEC CORP·Filed 2018·Granted Jan 21, 2020·1 cites·18 claims
- 2473US9551672B2Defect classifying method and optical inspection apparatus for silicon carbide substrateLASERTEC CORP·Filed 2014·Granted Jan 24, 2017·4 cites·46 claims
- 2572US2026044986A1Optical apparatus, inspection apparatus, image-capturing method, and non-transitory computer readable mediumLASERTEC CORP·Filed 2025·Application pending·0 cites
- 2671US9638739B2Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference maskLASERTEC CORP·Filed 2013·Granted May 2, 2017·2 cites·9 claims
- 2771US9013787B2Microscope and inspection apparatusLASERTEC CORP·Filed 2013·Granted Apr 21, 2015·2 cites·37 claims
- 2870US2026010078A1Light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 2969US2025357720A1Light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3068US10712287B2Inspection device and inspection methodLASERTEC CORP·Filed 2019·Granted Jul 14, 2020·1 cites·12 claims
- 3168US9970885B2Inspection apparatus and inspection methodLASERTEC CORP·Filed 2014·Granted May 15, 2018·3 cites·14 claims
- 3268US2026006707A1Control apparatus and light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3368US2025334885A1Light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3468US2026099915A1Image processing method, image processing apparatus, and learning methodLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3567US9991670B2Laser light source device and inspection deviceLASERTEC CORP·Filed 2015·Granted Jun 5, 2018·1 cites·7 claims
- 3667US7796343B2Photomask inspection apparatusLASERTEC CORP·Filed 2007·Granted Sep 14, 2010·2 cites·14 claims
- 3767US7548309B2Inspection apparatus, inspection method, and manufacturing method of pattern substrateLASERTEC CORP·Filed 2008·Granted Jun 16, 2009·2 cites·16 claims
- 3867US2025291262A1Optical apparatus and control method of optical apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
- 3967US2024280502A1Optical apparatus and focus correction methodLASERTEC CORP·Filed 2024·Application pending·0 cites
- 4065US12050184B2Mask inspection method and mask inspection apparatusLASERTEC CORP·Filed 2021·Granted Jul 30, 2024·0 cites·7 claims
- 4164US10706527B2Correction method, correction apparatus, and inspection apparatusLASERTEC CORP·Filed 2018·Granted Jul 7, 2020·1 cites·5 claims
- 4264US2025184611A1Image processing apparatus, inspection apparatus, review apparatus, image processing method, inspection method, and review methodLASERTEC CORP·Filed 2024·Application pending·0 cites
- 4364US2025176089A1Light source apparatus and optical apparatusLASERTEC CORP·Filed 2024·Application pending·0 cites
- 4461US12504270B2Calculation method, image-capturing method, and image-capturing apparatusLASERTEC CORP·Filed 2023·Granted Dec 23, 2025·0 cites·13 claims
- 4561US11353802B2Optical device, and method for preventing contamination of optical deviceLASERTEC CORP·Filed 2021·Granted Jun 7, 2022·0 cites·14 claims
- 4661US9544558B2Measuring apparatus and measuring methodLASERTEC CORP·Filed 2014·Granted Jan 10, 2017·2 cites·8 claims
- 4761US7764414B2Illumination apparatus and illumination methodLASERTEC CORP·Filed 2007·Granted Jul 27, 2010·2 cites·14 claims
- 4860US12308600B2Light source apparatus and inspection apparatusLASERTEC CORP·Filed 2022·Granted May 20, 2025·0 cites·8 claims
- 4960US9786057B2Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction methodLASERTEC CORP·Filed 2015·Granted Oct 10, 2017·1 cites·12 claims
- 5060US2025380348A1Light source apparatus and method for controlling light source apparatusLASERTEC CORP·Filed 2025·Application pending·0 cites
Showing the top 50 of 81 patent records by PatentIndex Score.
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