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LAVOIE ADRIEN
US5 patents
Top patents by PatentIndex Score
US8728956B2May 20, 2014
Plasma activated conformal film deposition
LAVOIE ADRIEN541 citations98
US8647993B2Feb 11, 2014
Methods for UV-assisted conformal film deposition
LAVOIE ADRIEN487 citations98
US8728955B2May 20, 2014
Method of plasma activated deposition of a conformal film on a substrate surface
LAVOIE ADRIEN70 citations95
US9611544B2Apr 4, 2017
Plasma activated conformal dielectric film deposition
LAVOIE ADRIEN44 citations94
US8993460B2Mar 31, 2015
Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants
LAVOIE ADRIEN7 citations84