Assignee
LAW KAM S
US·1 granted patent·2 pending applications·6 citations·filing 2006–2011
Top patents by PatentIndex Score
3 records- 0177US8617349B2Showerhead assembly for plasma processing chamberLAW KAM S·Filed 2010·Granted Dec 31, 2013·6 cites·29 claims
- 0242US2007151516A1Chemical vapor deposition apparatus and electrode plate thereofLAW KAM S·Filed 2006·Application pending·0 cites
- 0329US2011315081A1Susceptor for plasma processing chamberLAW KAM S·Filed 2011·Application pending·0 cites
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