Assignee
LAYH MICHAEL
DE5 patents
Top patents by PatentIndex Score
US9176390B2Nov 3, 2015
Method for adjusting an illumination system of a projection exposure apparatus for projection lithography
LAYH MICHAEL8 citations83
US9007559B2Apr 14, 2015
EUV collector with cooling device
LAYH MICHAEL4 citations72
US8724086B2May 13, 2014
Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation
LAYH MICHAEL4 citations72
US8891057B2Nov 18, 2014
Microlithographic projection exposure apparatus
LAYH MICHAEL2 citations61
US9304400B2Apr 5, 2016
Illumination system for EUV microlithography
LAYH MICHAEL0 citations39