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LEE DO-HAING
KR2 patents
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US8450680B2May 28, 2013
Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support
LEE DO-HAING1 citations48
US8089042B2Jan 3, 2012
Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support
LEE DO-HAING0 citations48