Assignee
LEE DONG-GUN
KR·9 granted patents·2 pending applications·14 citations·filing 2009–2012
Top patents by PatentIndex Score
11 records- 0183US8335038B2Apparatus for measuring aerial image of EUV maskLEE DONG-GUN·Filed 2010·Granted Dec 18, 2012·3 cites·26 claims
- 0279US9025624B2Beam generatorLEE DONG-GUN·Filed 2012·Granted May 5, 2015·3 cites·11 claims
- 0379US8715549B2Polyurethane-coated spandex fabric-fused midsole and apparatus and method for manufacturing the sameLEE DONG-GUN·Filed 2010·Granted May 6, 2014·3 cites·13 claims
- 0469US8335039B2Method of measuring aerial image of EUV maskLEE DONG-GUN·Filed 2011·Granted Dec 18, 2012·1 cites·20 claims
- 0568US8637840B2EUV projection lens and optic system having the sameLEE DONG-GUN·Filed 2010·Granted Jan 28, 2014·2 cites·21 claims
- 0666US8138483B2Method of measuring phase of phase shift maskLEE DONG-GUN·Filed 2009·Granted Mar 20, 2012·2 cites·8 claims
- 0755US8470500B2Reflective extreme ultraviolet maskLEE DONG-GUN·Filed 2011·Granted Jun 25, 2013·0 cites·7 claims
- 0849US8422760B2System for monitoring haze of a photomaskLEE DONG-GUN·Filed 2009·Granted Apr 16, 2013·0 cites·20 claims
- 0946US8119309B2Reflective photomask and method of fabricating, reflective illumination system and method of process using the sameLEE DONG-GUN·Filed 2010·Granted Feb 21, 2012·0 cites·19 claims
- 1041US2011240863A1Methods and apparatuses for measuring phase roughness in an extreme ultraviolet maskLEE DONG-GUN·Filed 2011·Application pending·0 cites
- 1141US2013056642A1Method and apparatus for measuring aerial image of euv maskLEE DONG-GUN·Filed 2012·Application pending·0 cites
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