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LEE JAESEOK
US
2 patents
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US8790160B2
Jul 29, 2014
Chemical mechanical polishing composition and method for polishing phase change alloys
LEE JAESEOK
4 citations
68
US8309468B1
Nov 13, 2012
Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloys
LEE JAESEOK
1 citations
47