Assignee
LEE KYOO HWAN
KR·3 granted patents·14 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0177US9022714B2Substrate processing system and substrate transferring methodLEE KYOO HWAN·Filed 2010·Granted May 5, 2015·8 cites·13 claims
- 0270US9252034B2Substrate processing system and substrate transferring methodLEE KYOO HWAN·Filed 2011·Granted Feb 2, 2016·5 cites·20 claims
- 0368US8440018B2Apparatus for supplying source and apparatus for deposition thin film having the sameLEE KYOO HWAN·Filed 2009·Granted May 14, 2013·1 cites·11 claims
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