Assignee
LEE SHEN-NAN
TW·3 granted patents·1 pending application·22 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0186US8153526B2High planarizing method for use in a gate last processLEE SHEN-NAN·Filed 2009·Granted Apr 10, 2012·13 cites·20 claims
- 0282US9132523B2Chemical mechanical polish process control for improvement in within-wafer thickness uniformityLEE SHEN-NAN·Filed 2012·Granted Sep 15, 2015·5 cites·20 claims
- 0371US8129279B2Chemical mechanical polish process control for improvement in within-wafer thickness uniformityLEE SHEN-NAN·Filed 2008·Granted Mar 6, 2012·4 cites·22 claims
- 0439US2008265416A1Metal line formation using advaced CMP slurryLEE SHEN-NAN·Filed 2007·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →