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LEE WHONCHEE

US3 patents

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US8101060B2Jan 24, 2012

Methods and apparatuses for electrochemical-mechanical polishing

LEE WHONCHEE10 citations83
US8450214B2May 28, 2013

Methods of etching single crystal silicon

LEE WHONCHEE1 citations61
US8294246B2Oct 23, 2012

Semiconductor structures including square cuts in single crystal silicon and method of forming same

LEE WHONCHEE2 citations61