Assignee
LEE WONCHUL
US4 patents
Top patents by PatentIndex Score
US8609546B2Dec 17, 2013
Pulsed bias plasma process to control microloading
LEE WONCHUL24 citations91
US8969936B2Mar 3, 2015
Semiconductor devices having increased contact areas between contacts and active regions and methods of fabricating the same
LEE WONCHUL14 citations81
US8518282B2Aug 27, 2013
Method of controlling etch microloading for a tungsten-containing layer
LEE WONCHUL5 citations72
US8802571B2Aug 12, 2014
Method of hard mask CD control by Ar sputtering
LEE WONCHUL1 citations51