Assignee
LEENDERS MARTINUS HENDRIKUS ANTONIUS
NL·9 granted patents·35 citations·filing 2006–2011
Top patents by PatentIndex Score
9 records- 0195US8786823B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Jul 22, 2014·7 cites·20 claims
- 0291US8421996B2Lithographic apparatusLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Apr 16, 2013·7 cites·20 claims
- 0391US8144305B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2006·Granted Mar 27, 2012·14 cites·36 claims
- 0471US9632425B2Lithographic apparatus, a dryer and a method of removing liquid from a surfaceLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2007·Granted Apr 25, 2017·2 cites·37 claims
- 0567US8953141B2Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquidLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2008·Granted Feb 10, 2015·2 cites·20 claims
- 0666US9019466B2Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply systemLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2007·Granted Apr 28, 2015·2 cites·28 claims
- 0765US8902403B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2011·Granted Dec 2, 2014·1 cites·23 claims
- 0854US8564760B2Lithographic apparatus, device manufacturing method and a control systemLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Oct 22, 2013·0 cites·20 claims
- 0953US8681311B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2011·Granted Mar 25, 2014·0 cites·6 claims
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